Special Seminar: Gabe Smith, "Thin film PZT-based piezoelectric MEMS technology"

Wednesday, January 28, 2015
5:30 p.m.
1146 AV Williams Building
Didier Depireux
depireux@umd.edu

Thin film PZT-based piezoelectric MEMS technology for Army applications

Gabe Smith
PiezoMEMS Team
Army Research Laboratory

Abstract
Piezoelectric MEMS processing has matured extensively over the past decade. It has proven to be an enabling material for a wide range of devices including actuation and sensing for RF MEMS and microrobotics. The Army Research Laboratory (ARL) has demonstrated many of these microscale devices through rigorous material development, device modeling and simulation, process development and testing. This talk will give a review of many of the PiezoMEMS project areas performed at ARL. It will then focus on two projects, a bioinspired rotational rate sensor and the smallest ultrasonic traveling wave motor ever reported in the literature.

Biography
Gabe Smith received his BS and MS at UMD in 1999 and 2002 respectively. He has worked in the field of MEMS Technology for his entire career with both the Navy and Army. For the first 10 years he designed MEMS fuze systems for torpedos and Army munitions. He was instrumental in a developing an enabling MEMS inertial switch that has been deployed in munitions in the Afghanistan conflicts. Over 2M have been produced. In 2009, Gabe joined the PiezoMEMS team at ARL where he has developed a wider array of MEMS devices including bioinspired sensors and adhesives, traveling wave motors, and next generation sensors for navigation.

Audience: Graduate  Undergraduate  Faculty  Post-Docs  Alumni  Corporate 

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